Capilix, integrated optics, microfluidics, sensors, sensor, mems, mst, microsystem, microsystems, chip, microchip, micromachining, microtechnology, nanotechnology, development, production, mass manufacturing, product, design for manufacturing, services, service, cleanroom, MESA, lab-on-a-chip, waveguides, waveguide, sion, silicon oxynitride, SiOxNy, foundry, CVD, PECVD, LPCVD, DRIE, RIE, reactive ion etching, KOH etching, wet etching, mask, oxidation, SiO2, SiRN, low stress silicon nitride, Si3N4, TEOS, dicing, implantation, boron, phosphorous, anneal, annealing, silicon, borosilicate glass, pyrex, quartz, fused silica, ZnO, zinc oxide, SU8, PolyImide, Optical Microscopy, Scanning Electron Microscopy, SEM, Surface Profiling, Ellipsometry, X-ray Photoelectron Spectroscopy, XPS, Transmission Electron Microscopy, TEM, Energy Dispersive X-ray analysis, EDX, anodic bonding, direct bonding, photolithography, sputtering, evaporation, flow-sensor, thermopile, thermocouple, OADM, membrane, mach-zehnder interferometer, young interferometer, matas, capillary electrophoresis, mixer, micromixer, electrical conductivity, ISFET, pH, electrochemical sensor, amperometric sensor, CHEMFET, Genomics, microarray, inkjet, nozzle, pharmacy, life sciences, space, industrial process control, ipc, telecom, electrophoresis, zero birefringence, refractive index, electro osmotic flow, EOF, CE, Jim Walker, Chris Lamaison, Jim Clements, Walter Dreifuss, Hans van den Vlekkert, Rene Heideman, Albert Prak, Henk Leeuwis, LioniX, Enschede, Twente, Holland, Netherlands, Lionics, Lionex, Melis Jan Gilde"
